WP2 SOI Technology Platform

WP2 will be focused on the development of the FDSOI technology toolbox to reach 12nm node requirements and beyond. It includes the implementation of a substrate pilot line and addresses the needs of the next generation of 12FDX defining technology pathfinding to deliver improved power-performance and competitive advantage and secure a FDSOI roadmap beyond the 22FDX.
Objectives:
The target of OCEAN 12 WorkPackage 2 is to make available all necessary technology blocks from SOI substrates to device integration, in order to enable the development and introduction of new generations of automotive platform. Beyond current 22FDX, it targets to deliver improved power-performance devices, giving competitive advantage to and securing FDSOI roadmap. Thus WP2 will focus on the development of FDSOI toolboxes to reach NextGen 22FDX, 12FDX and beyond technology nodes targets. From substrate to device aspects, it targets to upgrade performances thanks to engineering disruptive solutions. It includes the development of a substrate pilot line, to reach still-to-validate new technology specs, including new tools & metrology implement. It includes also development of pathfinding solutions to push substrate and device performances, including beyond 12FD targets.
Lead Soitec
Involved Partners :